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CSS, INC.

Cost Effective Spare Parts & Specialty Refurbishment

Electrostatic Chuck (ESC) Refurbishment

Polyimide ESC's commonly fail due to excessive polymer build up and arcing caused by film wear and anodized surface break down. CSS, Inc. provides significant cost reduction, refurbishment history tracking and predictive failure analysis based on the trends you create with your process and equipment configurations.

AMAT

- DPS - MXP - P-5000

LAM

- TCP 9600 - Excelan 4520

TEL

- SCCM - DRM - 8500

[email protected]

Information

Microsoft PowerPoint - CSS Flyer - ESC Refurbishment (white).ppt

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Microsoft PowerPoint - CSS Flyer - ESC Refurbishment (white).ppt