Read Denton Vacuum Desk V Quick Start Manual text version

Denton Vacuum, LLC Service: 609-304-9831 Email: [email protected]

DESK V Quick Start

DESK V Quick Start Manual Preliminary Manual

Denton Vacuum LLC 1259 North Church Street Moorestown NJ 08057 USA Phone: 1-856-439-9000 Fax: 1-856-439-9100 www.dentonvacuum.com

Rev: 04/28/09 IK

Page 1 of 13

Denton Vacuum, LLC Service: 609-304-9831 Email: [email protected]

DESK V Quick Start

Front View of Unit 1. 2. 3. 4. 5. 6. Touch Screen Head Support Vacuum Chamber Front Panel Removal Latch Gas Adjustment Shutter Position Adjustment

Rev: 04/28/09 IK

Page 2 of 13

Denton Vacuum, LLC Service: 609-304-9831 Email: [email protected]

DESK V Quick Start

Rear View of Unit 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. Fan Vacuum Chamber 120 VAC Input Power Connection Fuse 1 Mechanical Pump 8 Amps Fuse 2 24 VDC Power Supply 1 Amp Fuse 3 AC HVB Board 2 Amps Fuse 4 PLC Touch Screen 1 Amp Fuse 5 Rotation Motor (Option) 1 Amp Fuse 6 Turbo Pump (Option) 2 Amps Mechanical Pump 120 VAC Power Connection Gas Connection Vent Connection Mechanical Pump Piping Connection

Rev: 04/28/09 IK

Page 3 of 13

Denton Vacuum, LLC Service: 609-304-9831 Email: [email protected]

DESK V Quick Start

This is the Start up Screen. Push the System Start button.

Rev: 04/28/09 IK

Page 4 of 13

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DESK V Quick Start

Overview

This is the Overview Screen. It will appear as soon as System Start is pushed. This is the only screen where the Auto Process Timed Sputter and Timed Etch can be pushed. When either of those 2 buttons is pushed, all other buttons disappear with the exception of the Abort button. When the Abort button is pushed, all outputs will go off except for the mechanical pump. The Screen button will take you to this next screen. This is the main navigational area. The system will be shipped with default values for sputter time, sputter setpoint, etch time, and etch mode. The default value for sputter time is 120 seconds. Sputter setpoint is 35 mAmps. Etch time is 30 seconds. Etch mode is normal. The vent valve will automatically open when the Mechanical pump is off. The expected sputter process when the Timed Sputter Enable button is pushed is as follows: 1. Mechanical Pump will turn on and pump to below 40 mTorr. 2. The gas will turn on and stabilize for 30 seconds. 3. The sputter power will turn on after a 2 second delay. 4. The process will run until the timer completes. 5. It will vent (if such option selected)

Rev: 04/28/09 IK

Page 5 of 13

Denton Vacuum, LLC Service: 609-304-9831 Email: [email protected]

DESK V Quick Start

The Timed Etch Enable will run a similar process. The only differences would be shutter position, and the gas knob position to determine gas flow rate.

Screen

This is the Screen page. Each of these buttons will take you to a new screen, and Overview will take you back to the main page. The next pages will detail the screens in this order. Manual Sputter Screen Timed Sputter Setup Screen Manual Etch Screen Timed Etch Setup Screen

Rev: 04/28/09 IK

Page 6 of 13

Denton Vacuum, LLC Service: 609-304-9831 Email: [email protected]

DESK V Quick Start

Manual Sputter Screen

The first step in any process is to turn on the Mechanical Pump. The Power and Gas Valve will not turn on without the Mechanical Pump operating. In Manual mode, the operation for Sputtering is as follows. Step 1: Turn on Mechanical pump and wait until pressure is lower than 40 mTorr. Step 2: Turn on Gas Valve. Pressure will increase. Wait until pressure is between 50 and 70 mTorr. The gas flow is adjusted by the Gas flow adjustment valve (number 5 on the front screen). Move the gas valve clockwise to decrease flow, and counter clockwise to increase flow. Step 3: Put in a sputter setpoint. The setpoint should be between 35 and 50 mAmps. If there is no setpoint, the sputter power will not turn on. There is a 2 second delay before the power actually turns on. This is to ensure it has switched to the correct mode (Sputter or Etch). Do not run the power for more than 10 minutes. The Current Feedback will display only after power has been turned on. The system is designed to automatically tune output to the correct amperage. The feedback cannot display lower than 5 mAmps, thusly any value lower than 5 will be displayed as 5. The system will slowly ramp up power until the feedback matches the setpoint. For a more uniform coating, and if your machine has the option, turn on Rotation. If the machine has a shutter, the shutter position should be in the open mode. This adjustment is number 6 on the front screen overview. To get to the open position, move the shutter knob fully counter clock wise until both scissor shutters are clear.

Rev: 04/28/09 IK

Page 7 of 13

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DESK V Quick Start

Timed Sputter Setup Screen

This is the screen where you would adjust the auto sputter parameters. The process is started and aborted from the Overview screen. Sputter setpoint should be between 35 and 50 mAmps. Sputter time must be between 0 and 600 seconds. The Vent after Sputter button is an option to automatically vent the system after the process has completed.

Rev: 04/28/09 IK

Page 8 of 13

Denton Vacuum, LLC Service: 609-304-9831 Email: [email protected]

DESK V Quick Start

Manual Etch Screen

The first step in any process is to turn on the Mechanical Pump. The Power and Gas Valve will not turn on without the Mechanical Pump operating. In Manual mode, the operation for Etching is as follows. Step 1: Turn on Mechanical pump and wait until pressure is lower than 40 mTorr. Step 2: Turn on Gas Valve. Pressure will increase. Wait until pressure is between 100 and 150 mTorr. The gas flow is adjusted by the Gas flow adjustment valve (number 5 on the front screen). Move the gas valve clockwise to decrease flow, and counter clockwise to increase flow. Step 3: Put in a etch setpoint. The setpoint is Low, Normal or High. There is a 2 second delay before the power actually turns on. This is to ensure it has switched to the correct mode (Sputter or Etch). Do not run the power for more than 10 minutes. There is no current feedback while etching. The shutter position should be in the closed mode. This adjustment is number 6 on the front screen overview. To get to the closed position, move the shutter knob fully clock wise until both scissor shutters are covering the target.

Rev: 04/28/09 IK

Page 9 of 13

Denton Vacuum, LLC Service: 609-304-9831 Email: [email protected]

DESK V Quick Start

Timed Etch Setup Screen

This is the screen where you would adjust the auto etch parameters. The process is started and aborted from the Overview screen. Select an etch setpoint of Low, Normal or High. Etch time must be between 0 and 600 seconds. The Vent after Etch button is an option to automatically vent the system after the process has completed.

Rev: 04/28/09 IK

Page 10 of 13

Denton Vacuum, LLC Service: 609-304-9831 Email: [email protected]

DESK V Quick Start

Target Installation and Replacement

1

Tools: Phillips screwdriver. Target 1. Open Suptterhead 2. Remove grid screen 3. Remove retaining ring 4. Center target on plate 5. Replace retaining ring 6. Replace grid screen Close Sputterhead

2

3

3a

4

5

6

Rev: 04/28/09 IK

Page 11 of 13

Denton Vacuum, LLC Service: 609-304-9831 Email: [email protected]

DESK V Quick Start

Mechanical Pump Installation

Installation of vacuum hose to the pump

Rev: 04/28/09 IK

Page 12 of 13

Denton Vacuum, LLC Service: 609-304-9831 Email: [email protected]

DESK V Quick Start

Installation of vacuum hose to the rear of the DESK V

Mist Filter Installation

Rev: 04/28/09 IK

Page 13 of 13

Information

Denton Vacuum Desk V Quick Start Manual

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