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BioMEMS Device Integration, Packaging and Control for BioMEMS

Rubloff Research Group Accomplishments

BioMEMS Device Integration, Packaging and Control for BioMEMS

Accomplishment

Microfabricated SU8 on a Pyrex wafer defines the microchannel structure Patterned gold electrodes define the readily addressable assembly sites SU8-PDMS junction by pressure provides leak-tight and nonpermanent sealing Fluidic/electric ports provide transport and electric signal for biochemical assembly LabView-based control system coordinates liquid transport and electrodeposition

Significance

Integrated microfluidic system provides electric signal and optical access for biochemical assembly Nonpermanent sealing provides ex situ, post-process analysis Reusable packaging components Microfluidic Control System provides systematic operation process

People involved

Jung Jin Park, Xiaolong Luo, Theresa Valentine, Gary Rubloff Collaborations with Reza Ghodssi, Hyunmin Yi, Greg Payne, Bill Bentley

Links

BioMEMS Device Integration, Packaging and Control for BioMEMS

Publications

X. L. Luo, A. T. Lewandowski, H. M. Yi, R. Ghodssi, G. F. Payne, W. E. Bentley and G. W. Rubloff, "Reproducible Assembly and Catalytic Activity of a Metabolic Pathway Enzyme in Reusable BioMEMS Devices", Lab on a Chip, Submitted. J. J. Park, X. L. Luo, H. M. Yi, T. M. Valentine, G. F. Payne, W. E. Bentley, R. Ghodssi and G. W. Rubloff, "Chitosan-mediated in situ biomolecule assembly in completely packaged microfluidic devices", Lab on a Chip, 2006, 6, 1315-1321. J. J. Park, T. M. Valentine, R. Ghodssi, and G. W. Rubloff, "Integrated Chip and Package Design for Surface-Controlled Bioreaction Processes with Robust, Reusable Fluidic Sealing", Proceedings of MicroTAS 2005, 9th International Conference on Miniaturized Systems in Chemistry and Life Sciences (2005)

Presentations

J.J. Park, M.A. Powers, X. Luo, R. Ghodssi, and G.W. Rubloff, "BioMEMS Chip and Package Design for Surface-Controlled Bioreaction Processes", American Vacuum Society 52nd International Symposium & Exhibition, Boston, MA, October 30-November 4, 2005. J. J. Park, T. M. Valentine, R. Ghodssi, and G. W. Rubloff, "Integrated Chip and Package Design for Surface-Controlled Bioreaction Processes with Robust, Reusable Fluidic Sealing", Proceedings of MicroTAS 2005, 9th International Conference on Miniaturized Systems in Chemistry and Life Sciences (2005)

Biopolymer-based BioMEMS

· BioMEMS refers to the application of microelectromechanical systems (MEMS) to biology. Current bioMEMS devices are either semiconductor-based or polymer-based, mostly PDMS. A biopolymer-based bioMEMS devices are created when chitosan is enlisted. The unique properties of aminopolysaccharide chitosan confer the bioMEMS device with special advantages such as reusability and low average-use cost.

MEMS Convey electrical, optical signals Huge capability for data processing Long shelf time Biology Convey ions, molecules Molecular recognition capability for biosensing functions Labile (not stable)

·

· · ·

BioMEMS

· ·

·

Semiconductor-based · Photolithography · Expensive, time-consuming · Electric/optical accesses

Polymer-based (PDMS) · Soft lithography · Cheap and disposable · Lack of electric/optical accesses

Biopolymer-based (Chitosan) · · Photolithography Electric/optical accesses · · Reusable after mild acid wash Cheap average-use cost

BioMEMS Device Design and Fabrication

Design

Fluidic I/O Electrical I/O Pyrex

Fabrication

Drilled holes in 4" Pyrex

Au deposition and patterning

patterning SU8 microchannel

Optical micrograph

Compression bolt

Electrode (1 mm x 0.5 mm) sidewall Microchannel Pyrex Pyrex Microchannel ( 500 µm) Side wall (400 µm x 150 µm) Gold SU8 Electrode 500 µm

Compression Sealing

SU8 knife edge / PDMS gasket sealing

PDMS gasket Top sealing plate

Pyrex

SU8/PDMS compression seal

SU8 Micro-knife-edge

Pyrex

500 µm

Microfluidic channel

Testing flow rate: ~ 50 µl/min

Microfluidic Package

Features

· · · · Non-permanent sealing Fluidic and electrical I/O Reusable packaging components Transparency for optical access

Fluidic I/O Electrical I/O

Optical micrograph

I/O ring Top compression plate PDMS/Top sealing plate

Microfluidic channel

Electrical I/O

Microfluidic device Bottom plate

Fluidic I/O

BioMEMS Device and Control System

(a) (c)

PC with LabView Electric signal Control

Flow Control Power supply

waste Fluid flow Valve Counter Chitosan electrode Micropump Electric I/O Fluidic I/O Channel Electrode Water, PBS, Chitosan ...... Products or waste Valve

(b)

Information

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