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Pirani Vacuum Gauges

Digital and Analog Vacuum Gauge Systems

Features and Benefits

o Ideal vacuum gauge for foreline loadlocks

§ Rugged filament design for high reliability § Designed for use in harsh process environments § Rapid response to pump down § Repeatable measurements and independent relay set points for improved process control

o 10-4 Torr to atmosphere measurement range for

rough to medium vacuum applications

o Choice of two Pirani sensors: Series 345, shielded for

RF immunity; or the traditional Series 315

§ Sensor may be mounted in any position, increasing flexibility during installation § Gas-type sensitivity allows sensors to be used for rough leak detection

o Two controller models: Series 945, CE marked with a

digital LED display; or the Series 917, lower cost analog meter display

§ LED set point status indicators § Series 945 is fully CE compliant with EMC directive 89/336/EEC and Low Voltage Directive 72/23/EEC § Models available that indicate pressure in Torr, millibar, Pascal, or microns

HPS® Products

(800) 345-1967 (303) 449-9861

Application

The HPS line of Pirani controllers and sensors are ideal for applications in the rough to medium vacuum range. These include measurement of base pressures of mechanical vacuum pumps or start-up of system processes. The HPS® Pirani controllers and Pirani sensors are used in industrial applications such as semiconductor manufacturing, load locks, leak detection, vacuum coating, and food processing. The UHV compatible materials used in the sensor and the ability to bakeout the sensors make them useful in high energy physics applications such as accelerators and laser fusion projects.

®

Series 917 Controller The Series 917 controller is a lower cost option for atmosphere to medium vacuum measurement. It displays pressure from 10-3 Torr to atmosphere using a large analog meter, making it easy to see pressure trends. The 917 provides a buffered analog output for fast remote system monitoring through a 15 pin accessory connector in the back. Pirani Sensor The HPS® Pirani sensors are robust, dependable sensors with fast and stable pressure measurement. A thermal conductivity sensor, the Pirani sensor measures absolute pressure by measuring heat loss from a fine heated wire. Special temperature compensation circuitry provides for greater sensor stability over the operating range. The sensors are factory calibrated so that controller calibration is typically unnecessary when interchanging or replacing a sensor. A platinum filament ensures compatibility with a wide array of process gases. Only UHV compatible materials are exposed to vacuum. More accurate than a thermocouple sensor, the Pirani sensor measures over a wider pressure range and responds more rapidly to your process pressure changes. Like all thermal conductivity sensors, the Pirani sensor is innately gas-type sensitive. This feature makes it a simple solution for locating medium to fine leaks in vacuum systems. It complements a mass spectrometer leak detector, which is more efficient in finding smaller leaks. HPS® Products manufactures two Pirani models: the 345 and the 315 sensor. The 345 sensor is shielded for use where CE marking is a requirement and has a standard 9-pin D-sub connector. The 315 sensor uses a durable plastic enclosure and an octal connector. HPS® Pirani gauges are manufactured by the HPS® Products MKS Instruments, Inc. in Boulder, Colorado. For more information call (303)449-9861 or (800)345-1967.

Description

Pirani Controllers HPS® Pirani controllers are single-channel, designed to be economical and user-friendly and provide fast reliable pressure measurement. All of the operating controls are conveniently accessible from the front panel of the controller, including the power on-off switch. Two standard independent relay set points allow you to control your process. The relays can be set to trip anywhere within the controller's set point range. Adjust the set points from the front panel while viewing the large, easy-to-read display. Red LED's indicate set point activation status. You can check the set point at any time with no break in process control. An analog output signal is standard and is accessible from the rear of the controller. Choose a Pirani controller in one of four models that measures either in Torr, millibar, Pascal, or microns. The controller can be easily installed in a standard ¼ DIN panel cutout with the optional mounting kit. Included with the Pirani controller is a power cord, an accessory connector kit, and an instruction manual. The Pirani sensor and its cable are ordered separately. Series 945 Controller The Series 945 displays pressure from 10-4 to 100 Torr on a highly-visible red LED readout. A buffered analog signal is available through the 9 pin accessory connector at the rear of the controller. For quick controller calibration, atmosphere and zero adjustment potentiometers are located on the front panel. The 945, when used in conjunction with the 345 sensor, has passed the requirements of the European Directives and is CE marked.

Series 945 Specifications

Measuring Range 1.0 x 10-4 to 100 Torr 1.0 x 10-4 to 130 mbar 1.0 x 10-2 to 1.3 x 10+4 Pascal 1.0 x 10-1 to 1.0 x 10+5 microns 2.0 x 10-3 to 99 Torr 2.7 x 10-3 to 130 mbar 2.7 x 10-1 to 1.3 x 10+4 Pascal 2.0 to 9.9 x 10 +4 microns

Dimensions

in./(mm)

Set Point Range

Power Requirements 90 to 130 VAC, 50/60 Hz, 9 W and Consumption 210 to 250 VAC, 50/60 Hz, 9 W Resolution Set Point Relays Set Point Response Output Voltage Front Panel 1% of indicated decade, 10% of decade for pressures less than 10 -3 Torr 2 independently set, SPDT contacts, resistive load; 1 A @ 24 VAC/DC 150 msec maximum 0.20 to 3.25 VDC, buffered analog, 1k maximum output impedance Two LED's, push buttons, and potentiometers for use with setpoints; power switch; zero adjustment; atmospheric adjustment Red LED display; 0.6"-high readout of 2 digits and 1 exponent; units shown in either Torr, mbar, Pascal, or microns 89/336/EEC EMC Directive 73/23/EEC Low Voltage Directive 2.2 lb (1.0 kg)

Display

CE Certification Weight

Series 917 Specifications

Measurement and Set Point Range 1.0 x 10-3 Torr to atmosphere 1.0 x 10-3 mbar to atmosphere 1.0 x 10-1 Pascal to atmosphere 1.0 x 10-1 microns to atmosphere

Power Requirements 90 to 130 VAC, 50/60 Hz, 7 W and Consumption 210 to 250 VAC, 50/60 Hz, 7 W Set Point Relays 2 independently set, SPDT contacts, resistive load; 2 A max. operating current at 28VDC/AC 15 to 150 msec Analog: 0 - 3.25 V, 1k maximum output impedance Power on/off; set point view buttons, LED set point indicators, set point adjust potentiometers 3½" 95° deflection analog meter 2.2 lbs. (1.0 kg)

Pirani Controllers Specifications

Operating Temperature 5° to 40°C (41° to 104°F)

Set Point Response Output Voltage Front Panel

Storage Temperature -10° to 55°C (14° to 104°F) Relative Humidity 80% maximum for temperatures less than 31°C, decreasing linearly to 50% maximum at 40°C 2000 m maximum Overvoltage Category II Pollution Degree 2

Altitude Insulation Coordination

Display Weight

315 Sensor Specifications

Measurement Range 1.0 x 10 Torr to atmosphere (Controller Dependent) 1.0 x 10-4 mbar to atmosphere 1.0 x 10-2 Pascal to atmosphere 1.0 x 10-1 microns to atmosphere Materials Exposed to Vacuum Reproducibility Stainless steel, nickel 200, alumina ceramic, platinum, silver brazing alloy 5% of reading at constant temperature

-4

345 Sensor Specifications

Measurement Range 1.0 x 10-4 Torr to atmosphere (Controller Dependent) 1.0 x 10-4 mbar to atmosphere 1.0 x 10-2 Pascal to atmosphere 1.0 x 10-1 microns to atmosphere Materials Exposed to Vacuum Reproducibility Stainless steel, nickel 200, alumina ceramic, platinum, silver brazing alloy 5% of reading at constant temperature

Cables and Connectors 9-pin D-sub (from 945) or 15-pin D-sub (from 917) to octal connectors, multiconductor shielded cable, maximum length is 500 feet Bakeout Temperature 50°C (122°F)

Cables and Connectors 9-pin D-sub (from 945) or 15-pin D-sub (from 917) to 9-pin D-sub connectors, multiconductor shielded cable, maximum length is 500 feet Bakeout Temperature 50°C (122°F)

Operating Temperature 0° to 50°C (32° to 122°F) Calibration Gas Installation Orientation Weight Internal Volume Air/nitrogen Any 0.5 lb (0.2 kg) 0.5 in. (8.0 cm ) maximum

3 3

Operating Temperature 0° to 50°C (32° to 122°F) Calibration Gas Installation Orientation Weight Internal Volume Air/nitrogen Any 0.5 lb (0.2 kg) 0.5 in.3 (8.0 cm3) maximum

315 Sensor Dimensions

in./(mm)

345 Sensor Dimensions

in./(mm)

SIZE

NW 16 KF 1 1/3" CF 2 3/4" CF 8 VCR®-F 1/8" NPT-M 15 mm. tube 18 mm. tube

A

5.37/(136) 6.63/(169) 6.55/(167) 6.60/(168) 6.20/(157) 5.83/(148) 5.83/(148)

SIZE

NW 16 KF NW 25 KF 1 1/3" CF 2 3/4" CF 8 VCR®-F 1/8" NPT-M 15 mm. tube 18 mm. tube

A

4.83/(123) 4.34/(110) 5.87/(149) 5.87/(149) 5.83/(148) 5.65/(144) 5.78/(147) 5.78/(147)

Ordering Information

Description

Series 945 Digital Pirani Controller*

120 volts, Torr readout 220 volts, Torr readout 120 volts, micron readout 220 volts, micron readout 120 volts, Pascal readout 220 volts, Pascal readout 120 volts, mbar readout 220 volts, mbar readout 945-A-120-TR 945-A-220-TR 945-A-120-MC 945-A-220-MC 945-A-120-PA 945-A-220-PA 945-A-120-MB 945-A-220-MB 109170009 109170010 109170011 109170012 109170013 109170014 109170015 109170016 103150010 103150013 103150014 103150012 103150011 103150016 103150018 103450010 103450015 103450013 103450014 103450012 103450011 103450016 103450018 $395 $395 $395 $395 $395 $395 $395 $395 $335 $335 $335 $335 $335 $335 $335 $335 $125 $145 $150 $135 $125 $150 $150 $125 $150 $145 $150 $150 $125 $150 $150

Part Number

Price

Series 917 Analog Pirani Controller*

90-130 volts/50-60 Hz, Torr readout 210-250 volts/50-60 Hz, Torr readout 90-130 volts/50-60 Hz, Pascal readout 210-250 volts/50-60 Hz, Pascal readout 90-130 volts/50-60 Hz, mTorr/microns readout 210-250 volts/50-60 Hz, mTorr/microns readout 90-130 volts/50-60 Hz, mbar readout 210-250 volts/50-60 Hz, mbar readout

Series 315 Pirani Sensor

NW 16 KF 1 1/3" CF 2 3/4" CF 8 VCR®-F 1/8" NPT-M 15 mm tube 18 mm tube NW 16 KF NW 25 KF 1 1/3" CF 2 3/4" CF 8 VCR®-F 1/8" NPT-M 15 mm tube 18 mm tube

* Includes controller, power cord, manual, and output connector.

Series 345 Shielded Pirani Sensor - for CE Compliance

For additional technical information and installation hardware go to www.vacuumgauge.com.

Ordering Information

Description

10 ft (3.0 m) 25 ft (7.6 m) 50 ft (15.2 m) 100 ft (30.5 m) Custom (max. length 500 ft) 10 ft (3.0 m) 25 ft (7.6 m) 50 ft (15.2 m) Custom (max. length 500 ft) 10 ft (3.0 m) 25 ft (7.6 m) 50 ft (15.2 m) 100 ft (30.5 m) Custom (max. length 500 ft) 10 ft (3.0 m) 25 ft (7.6 m) 50 ft (15.2 m) Custom (max. length 500 ft)

Part Number

103150006 103150007 103150008 103150017 103150009

Price

$50 $80 $100 $150 $150 + $1.15/ft $50 $80 $100 $150 + $1.15/ft $50 $80 $100 $150 $150 + $1.15/ft $50 $80 $100 $150 + $1.15/ft $11 $14 $14 $20 $25 $25 $40 $25 $30 $35 $40 $45

Cable, Series 315 Sensor to Series 945 Controller

Cable, Series 345 Shielded Sensor to Series 945 Controller

103170006SH 103170007SH 103170008SH 103170009SH

Cable, Series 315 Sensor to Series 917 Controller

100004068 100004069 100004070 100006188 100004071

Cable, Series 345 Shielded Sensor to Series 917 Controller

100009995 100009996 100009997 100009998

Accessories

Power cord, 115 VAC Series 945 output connector kit Series 917 output connector kit Mounting hardware Series 945 user's manual Series 917 user's manual Octal to 9 pin adapter Rack panel, 19", 3U 1/4 DIN, blank Rack panel, 19", 3U 1/4 DIN, 1 cutout Rack panel, 19", 3U 1/4 DIN, 2 cutouts Rack panel, 19", 3U 1/4 DIN, 3 cutouts Rack panel, 19", 3U 1/4 DIN, 4 cutouts 103150001 100008103 100005087 100005021 109450020 109170020 100009993 100005456 100005457 100005458 100005459 100005460

For additional technical information and installation hardware go to www.vacuumgauge.com.

Bulletin 01/01 Pirani Gauges Due to continuous development, specifications and prices are subject to change without notice. Copyright © 2000 by HPS Products MKS Instruments, Inc. All rights reserved. HPS® is a registered trademark of MKS Instruments, Inc. VCR® is a registered trademark of Swagelok® Company.

HPS® Products

5330 Sterling Drive Boulder, CO 80301 (800) 345-1967 or (303) 449-9861 FAX (303) 442-6880 www.mksinst.com

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Pirani Vacuum Gauges

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