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200mm FACT SHEET

Metrology

Key Features

>World-class 200mm 65nm technology nodecapable tool set >65nm technology node-capable defect inspection, monitoring and control >SPC-controlled and stable equipment with a production CMOS pedigree >Full range of metrology for thin film, topography, critical dimension and registration assessment >State-of-the-art metallic element control metrology & protocol to ensure the fab remains CMOS-capable for all customers' development efforts >Mobile ion monitoring capability to support your development >Capacitive-Voltage and Current-Voltage monitoring capability for state-of-the-art dielectric monitoring >A full suite of electrical test capabilities for monitoring parametrics for both our baseline and your line

SVTC Technologies is an independent semiconductor process-development foundry that enables the development and commercialization of innovative semiconductorbased technologies and products in an accelerated, cost-effective and IP-secure way. SVTC's metrology tools, from leading equipment manufacturers, offer advanced capabilities that enable you to monitor, measure and inspect your development processes. We provide a broad spectrum of metrology capabilities at both our San Jose, California, and Austin, Texas, facilities.

DESIGN CREATE REALIZE

Metrology

Capability

Epi doping Dielectric Monitor (mobile ion, EDT, trap density, charge) Implanter Monitor Thin Film Thickness and Composition Step Height Stress Dopant & Contamination Concentration SEM Critical Dimension Measurements Overlay Blank Wafer Defect inspection to > 65 nm Pattern Wafer Defect Inspection to > 60 nm Epi / SiGe thickness Contamination Top View Scanning Electron Inspection & Micrographs Metal Thickness Ellipsometer Dielectric Thickness, N & K Values EOT measurement - Gate Monitor Ellipsometry - Film Thk w UV/Deuterium Source w Desorber Dark Field Wafer Defect Inspection Four Point Probe contact Resistivity Four Point Probe contact Resistivity Inspection Scope, (150X) Defview Review & UV Inspet. scope, (x250) Automated Particle Unpat. Surf. Insp. Film Stress & Wafer Bow Film Stress & Wafer Bow Dopant and Contamination Concentration Film Thickness Measurement- Reflectometry Film Thickness Measurement- Reflectometry Inductively Coupled Plasma Mass Spec Texture Measurement - Laser based Profiler/Atomic Force Micro. - Tapping Mode with Silicon Tip Wafer Flatness Total Reflect X-Ray Fluor. Spect. Overlay inspection SEM Top-Down CD, Etch Depth & Profile Angle w Tilt Metal Film T- Opto-acoustic, Automated X-Ray Refl./X-Ray Flor. Thin Film measurement

Tools

Prometrix 4 pt probe KLA Quantox Prometrix KLA ASET F5x, Thermawave Optiprobe Tencor P22 Flexus Biorad - FTIR AMAT Verity CD SEM, AMAT VeraSEM KLA ArcherAIM KLA SP1 TBI KLA 2360 Biorad FTIR Technos TXRF620 AMAT G2 Full Wafer Inspection SEM Prometrix JA Woollam VU-301 KLA-Tencor Quantox-300 Thermawave OP5240 Opti-Probe AMAT Complus Four Dimensions 300 Prometrix 4PT probe Kinetek DR-300C Olympus, FR3200 KLA-Tencor Surfscan 6420 or 6220 KLA-Tencor Flexus 5400 Frontier Semiconductor FSM 9000-TC Nicolet Magna 550 Series II KLA-Tencor UV1050 Prometrix FT530 Agilent Technologies 4500 Veeco TMS-3000W Veeco - Digital Instruments VX310 AFM ADE 9700 TECHNOS (PHILLIPS) TREX630 KLA-Tencor 5100-03 Auto Misreg Sys AMAT CD-SEM Metrology Sys 3D or AMAT Verity SEM Phillips Impulse 300B Jordan Valley JVX 5200T XRR/XRF TF Meas.

FE/BE

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Location

San Jose San Jose San Jose San Jose San Jose San Jose San Jose San Jose San Jose San Jose San Jose San Jose San Jose San Jose San Jose Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin Austin

FACT SHEET

SVTC Technologies 3901 North First Street San Jose, CA 95134 (408) 240-7000 2706 Montopolis Drive Austin, TX 78741 (512) 356-2000

Copyright © 2008 SVTC Technologies, Inc. All rights reserved. SVTC and the SVTC logo are trademarks of SVTC Technologies.

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