Read Tass300E3_Specifications.pdf text version

FOUP Load Port

MODEL : TAS300 TYPE : E3

Product Specifications

CE Marking

02TE3138~02TE3140

Note

Specifications and design may be changed without prior notice.

E182E120 2002/NOV

Contents

1. Overview ................................................................................................................ 1 E182E120 2. Features ................................................................................................................... 1 E182E120 3. Basic Specifications............................................................................................. 2 E182E120

3.1 3.2 3.3 3.4 3.5 3.6 3.7 3.8 3.9 3.10 3.11 3.12 3.13 3.14 Applicable FOUPs .......................................................................................... 2 FOUP Positioning Clamp................................................................................ 2 FOUP Door Lock ............................................................................................ 2 Detection Functions ........................................................................................ 2 Indicator .......................................................................................................... 3 Strokes............................................................................................................. 3 Repetition Precision ........................................................................................ 3 Operation Time ............................................................................................... 3 Weight ............................................................................................................. 3 Utilities............................................................................................................ 3 Usage Environment......................................................................................... 4 Storage Environment....................................................................................... 4 Noise ............................................................................................................... 4 Over-rotation Latch Key ................................................................................. 4 E182E120 E182E120 E182E120 E182E120 E182E120 E182E120 E182E120 E182E120 E182E120 E182E120 E182E120 E182E120 E182E120 E182E120

4. Configuration ........................................................................................................ 4 E182E120

4.1 4.2 4.3 4.4 4.5 4.6 4.7 External View.................................................................................................. 4 Dimensions...................................................................................................... 5 Mechanical Interface....................................................................................... 6 Working Area .................................................................................................. 7 Operation Flow ............................................................................................... 7 Installation Environment................................................................................. 7 Accessories...................................................................................................... 8 E182E120 E182E120 E182E120 E182E120 E182E120 E182E120 E182E120

5. Optional Specifications....................................................................................... 8 E182E120

5.1 5.2 5.3 Power Cable .................................................................................................... 8 E182E120 Mapping Unit .................................................................................................. 9 E182E120 Other Options.................................................................................................11 E182E120 11 E182E120

6. Safety Cautions and Warnings ............................................................ 11

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1. Overview

The TAS300 is a standard load port that automatically opens and closes the FOUP (Front Opening Unified Pod). (The FOUP is used in the semiconductor manufacturing process.) Installed in a variety of semiconductor systems, the TAS300 provides the highest level of low dusting characteristics and the high throughput and repetition durability required in manufacturing semiconductors.

2. Features

(1) SEMI Standard compliance E15.1-0600 E57-0600 E62-0302A E63-0600 E64-0600 (2) The moving components including the mapping unit are housed under the wafer surface. Complete airflow analysis has been carried out to achieve the world's best particle-free system. (3) Through its use of a docking plate and the FIMS door's air-cushion system, the TAS300 is compatible with a variety of FOUPs--securing the opening and closing of the FOUPs. (4) A mapping unit (transmission sensor) can be installed on the FIMS door. (Optional) (5) The TAS300 continues to provide high performance in repetitive door opening and closing over long periods while providing high durability. (6) The TAS 300 has an obstacle detection function when the FOUP is docked. (7) The TAS300 can detect the FOUP and determine whether it has been correctly loaded. (8) To reduce the load port loading/unloading time, a load port positioning mechanism has been implemented on the BOLTS surface.

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3. Basic Specifications

3.1 Applicable FOUPs

300mm FOUP (Using 25 wafers) F300-1003 (Entegris, Inc.) 300mm FOUP (Shin-Etsu Polymer Co., Ltd.) SEMI E47.1/E62 compliant

3.2 FOUP Positioning Clamp

Kinematic pin positioning Using the Front Retaining Feature (air driven)

3.3 FOUP Door Lock

Vacuum suction

3.4 Detection Functions

(1) FOUP presence check (2) FOUP placement check

Transmission sensor optical axis

Sensor pin & photo microsensor

(3) Obstacle detection

(4) Wafer protrusion in FOUP

Wafer protrusion (3mm) is detected from the FOUP shell seal surface .

Wafer Transmission sensor optical axis Transmission sensor optical axis

Note: The glass wafer specification is optional. 2 E182E120

3.5 Indicator

Red

Yellow

Yellow

Green

Orange

White

Yellow

Green

3.6 Strokes

Y-axis (FOUP: Forward/Retract): 70mm (SEMI Standard) Z-axis (FOUP door up/down): 375mm

3.7 Repetition Precision

Y-axis (FOUP: Forward/Retract): ±0.1mm Z-axis (FOUP door up/down): ±0.1mm

3.8 Operation Time

No mapping FOUP open: 10 seconds (From when the FOUP is set to when the wafer is ready to be picked up) FOUP close: 10 seconds (From when the door is ready to be closed to when the FOUP is ready to be picked up.) Mapping (Optional) FOUP open: 20 seconds FOUP close: 10 seconds

3.9 Weight

55kg

3.10 Utilities

Power: 24V ± 5% /3A (Full-load current: 2A) Circuit breaker rating: 50A Dry air: 0.52MPa 0.6MPa 5L/min (6 mm air tube) Vacuum: 30kPa 50kPa 10L/min (8 mm air tube) Exhaust: (6 mm air tube) 3 E182E120

3.11 Usage Environment (The system must be installed in a clean room.)

(1) Ambient temperature: 5ºC 30ºC (2) Ambient humidity: 30% 80% (No condensation) Note: 20ºC: 90% or less / 40ºC: 50% or less (3) Luminosity: 300 Lux (Working area) 500 Lux (Operation area) (4) Altitude: Sea level 1,000 m or less

3.12 Storage Environment

(1) Storage temperature: ­10ºC (2) Storage humidity: 30% 55ºC 80% (No condensation)

3.13 Noise

Max: 60 dB (Aeq)

3.14 Over-rotation Latch Key

Corrects the FOUP latch key hole position to the regular position (90°) when the FOUP is latched.

4. Configuration

4.1 External View

Indicator Suction pad BOLTS plane (Installation surface)

Latch key Kinematic pin Docking plate FOUP clamp FIMS door Table base

Control unit

Side base

Connector

Air IN Exhaust IN

Vacuum IN

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4.2 Dimensions

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4.3 Mechanical Interface (Complies with the SEMI Standard (E63-0600))

This section describes the interface that must have been installed in the system before the load port is installed.

(Load port (main unit) dimensions) Main unit installation screw

BOLTS plane

486 (Load port (main unit) dimensions)

Opening Opening

862 (Load port (main unit) dimensions)

Surface inclination fulcrum point

Unit: mm

To prevent intrusion of external particles, maintain the air pressure as follows: (System pressure) ­ (load port pressure) = 2Pa For details on the communication interface, see the "Interface Specifications".

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4.4 Working Area

Load port front 1m

Rear

Front

4.5 Operation Flow

Opening

Set the FOUP. Dock the FOUP. (Move to the port door.) Open the FOUP door. FOUP door ­ Vacuum suction Lower the FOUP door. Cancel the FOUP latch.

Wafer load/unload in FOUP (by system robot) Closing

Raise the FOUP door. Close the FOUP door. Latch the FOUP. Cancel the FOUP door vacuum suction. Undock the FOUP. (Move to the FOUP set position.)

4.6 Installation Environment (Preparation)

(1) Installation tools Level Plumb-bob Square (with frame, 300mm (Recommended)) Parallel bar (L=250mm, H=35mm, W=25mm (Recommended)) Scale (1,000mm) General tools Installation jig (TDK) (2) Operation check Power cable (Connector: 206060-1, Pin: 66101-1 (Tyco Electronics AMP K.K.)) --- Optionally purchased Air tube 6 (Air source) Air tube 8 (Vacuum source) Air tube 6 (Air exhaust) Personal computer (Windows 95, 98, ME, NT4.0 or 2000. Serial I/F) RS232C cable (Dsub 9-pin cross cable) Maintenance tool --- (FD or CD-R: Included) 7 E182E120

(Working area)

4.7 Accessories

Adjustment plate A Adjustment plate B Installation jigs (Left/Right, Total 2) --- Provided when the system is purchased for the first time. Maintenance tool (FD or CD-R) Interlock override key Mechanical stopper

5. Optional Specifications

5.1 Power Cable

OPT3 24V connection line (System side) Connector name: CNA1 (System side) Connector: 206060-1 (Tyco Electronics AMP K.K.) Contact pin: 66101-1 (Tyco Electronics AMP K.K.) Fitting tool: 58495-1 (Tyco Electronics AMP K.K.) Cable clamp: 206062-1 (Tyco Electronics AMP K.K.) Wire: RO-FLEX 1100T AWG19, 3 cores (Nichigo Communication Electric Wire Co., Ltd.) Wire length: 2m/4m/6m

Shielding: 20mm 24V (Black 1) 24V (Green/Yellow)

(Black 2)

Shielding length: 2m/4m/6m

0V

Mark the tubes with "24V ", "FG" or "0V ".

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5.2 Mapping Unit

(1) Wafer detection 2 overlapped wafers Skew wafer 1 row (See Figure 1.) 2 rows (See Figure 2.)

Figure 1

Figure 2

(2) Operation flow Load port ­ Origin Dock the FOUP. Open the FIMS door. Lower the FIMS door and mapping unit to mapping start position. Move the mapping unit forward. Stopper ON: Mapping Stopper OFF: Retract the mapping unit. Lower the FIMS door and the mapping unit.

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Load port ­ Origin

Up/down cylinder (door, mapping unit) Up/down cylinder (mapping unit)

Fore and aft cylinder (mapping unit) Overrun prevention cylinder (mapping unit)

Dock the FOUP.

Open the FIMS door.

Stopper ON: Mapping

Stopper OFF: Retract the mapping unit. Lower the FIMS door and the mapping unit.

Lower the FIMS door and mapping unit to mapping start position. Move the mapping unit forward.

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5.3 Other Options

Carrier ID Reader (Writer) BCR (KEYENCE) RF-IDR/W (Omron) Hermos/Asyst RF-IDR/W: Under review for implementation Optical I/O (Hokuyo Automatic) Sealing material (NICHIAS: T/#9096-TB-54) Quartz glass wafer fly-out sensor Info Pad pin Info Pad A, B (Electrical detection and lock out pin) Info Pad C, D (Lock out pin) Registration pin

6. Safety Cautions and Warnings

TDK provides an instruction manual that describes product characteristics and specifications. To ensure safe operation and to prevent accidents by operating the machine incorrectly, please read carefully the instruction manual before using the product. Contact TDK for a copy of the instruction manual.

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Information

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